34、3D 六边形膜结构电容式微机械超声换能器（CMUT）的膜位移研究

3D 六边形膜结构电容式微机械超声换能器（CMUT）的膜位移研究

1. 单单元六边形几何结构的膜位移

1.1 CMUT 模型制作

CMUT 模型采用厚度为 0.75 µm 的氮化硅薄六边形膜制作。其物理特性如下表所示：
| Model reference | Properties | Components |
| — | — | — |
| Name: Silicon dioxide
Model category: Linear elastic isotropic
Yield strength: 1.55 × 10⁸ N/m²
Tensile strength: 1.1 × 10⁸ N/m²
Compressive strength: 1.38 × 10⁹ N/m²
Elastic modulus: 7.3 × 10¹⁰ N/m²
Poisson’s ratio: 0.17
Mass density: 2650 kg/m³
Shear modulus: 3.23 × 10¹⁰ N/m² | | Solid Body 1 (Boss - Extrude1) (Base Hexagonal 28 - 4) |
| Name: Silicon nitride
Model category: Linear elastic isotropic
Tensile strength: 2.8 × 10⁸ N/m²
Elastic modulus: 3.2 × 10¹¹ N/m²
Poisson’s ratio: 0.263
Mass densi