Wafer cooling for a high current serial ion implantation system

本文献综述涵盖了多个领域的研究论文,包括半导体制造过程中的晶圆冷却技术、三维心脏重建技术、发动机曲轴系统逆向工程、高密度记录性能的热效应等。涉及的技术领域广泛,从生物医学到机械工程再到材料科学。

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TitleAuthorsPublish Date
Wafer cooling for a high current serial ion implantation systemRadovanov, S.B.; Walther, S.R.; Evans, E.; Ballou, J.; White, N.R.; Frutiger, W.1998
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