设置sensor的缺陷

1.deep level transient spectroscopy (DLTS)

根据网上的信息,深能级瞬态光谱(DLTS)是一种用于研究半导体中电活性缺陷(又称为载流子陷阱)的实验工具¹。DLTS可以确定缺陷的基本参数并测量它们在材料中的浓度⁴。一些参数被认为是缺陷的“指纹”,用于它们的识别和分析¹。

(1) Deep-level transient spectroscopy - Wikipedia. https://en.wikipedia.org/wiki/Deep-level_transient_spectroscopy.
(2) Deep Level Transient Spectroscopy: A Powerful Experimental Technique .... https://www.intechopen.com/chapters/47975.
(3) 深能级瞬态光谱检测(DLTS) | 瑞士苏黎世仪器. https://www.zhinst.cn/cn/applications/impedance-measurements/deep-level-transient-spectroscopy-dlts.
(4) Deep Level Transient Spectroscopy - an overview - ScienceDirect. https://www.sciencedirect.com/topics/chemistry/deep-level-transient-spectroscopy.
(5) Brief introduction to Deep Level Transient Spectroscopy. https://www.researchgate.net/publication/334327310_Brief_introduction_to_Deep_Level_Transient_Spectroscopy.
(6) 深能级瞬态谱仪 - Zhejiang University. http://silab.zju.edu.cn/2013/0530/c15286a715762/page.htm.

2.DLTS的原理和应用

DLTS的原理是利用半导体结的电容瞬变来检测深层能级的载流子发射过程¹²³。首先,通过将半导体结反向偏置,大部分移动电荷载流子会被耗尽。随后,通过正电压脉冲将电压短暂置零,空陷阱被填充。在恢复反向偏置后,陷阱中的载流子会根据不同的发射速率逐渐释放,导致电容发生瞬态变化¹²。通过测量不同温度下的电容瞬变曲线,可以得到深层能级的浓度、能级位置、捕获截面等参数⁴。

DLTS的应用主要是研究和检测半导体材料和器件中的缺陷、杂质、界面态等³⁵。DLTS可以用于分析太阳能电池、激光二极管、场效应晶体管、半导体异质结等方面的性能和可靠性⁶⁴。

(1) 【应用介绍】深能级瞬态光谱检测(DLTS) - 知乎. https://zhuanlan.zhihu.com/p/612908540.
(2) 深能级瞬态光谱检测(DLTS) | 瑞士苏黎世仪器. https://www.zhinst.cn/cn/applications/impedance-measurements/deep-level-transient-spectroscopy-dlts.
(3) 深能级瞬态谱仪的原理和应用 - 百度学术 - Baidu. https://xueshu.baidu.com/usercenter/paper/show?paperid=07694e5a156aca8b25003e16adf71911.
(4) DLTS方法的详细说明 | Ceramicforum的宽禁带半导体与玻璃溶解技术. http://www.ceramicforum.co.jp/ch/dlts/dlts.html.
(5) 深层瞬态光谱_全球百科. https://vibaike.com/114166/.
(6) 太阳能电池分析技术(4):深能级瞬态光谱 DLTS_化工仪器网. https://www.chem17.com/tech_news/detail/2988160.html.

3.DLTS的实验设备和步骤

DLTS的实验设备主要包括以下几个部分¹²³:
- 一个能够提供反向偏置电压和正电压脉冲的电源。
- 一个能够测量半导体结的电容变化的电桥或阻抗分析仪。
- 一个能够控制温度变化的恒温槽或低温制冷器。
- 一个能够记录和分析数据的计算机或示波器。

DLTS的实验步骤大致如下¹²³:
- 将半导体结连接到电源、电桥或阻抗分析仪、计算机或示波器等设备上。
- 将半导体结放入恒温槽或低温制冷器中,调节温度到所需范围。
- 对半导体结施加反向偏置电压,使其处于耗尽状态。
- 给半导体结施加正电压脉冲,使其瞬间平衡,然后恢复反向偏置电压。
- 测量半导体结的电容瞬变曲线,并记录数据。
- 改变温度,重复上述步骤,直到完成所有温度点的测量。
- 对数据进行分析,计算深层能级的参数。

(1) 深能级瞬态光谱检测(DLTS) | 瑞士苏黎世仪器. https://www.zhinst.cn/cn/applications/impedance-measurements/deep-level-transient-spectroscopy-dlts.
(2) 【应用介绍】深能级瞬态光谱检测(DLTS) - 知乎. https://zhuanlan.zhihu.com/p/612908540.
(3) 米格实验室平台-深能级瞬态谱DLTS测试 - migelab.com. http://www.migelab.com/Article/articleDetails/aid/8244.html.
(4) 低温HERA-DLTS高能分辨率深能级瞬态谱 - 知乎 - 知乎专栏. https://zhuanlan.zhihu.com/p/534259009.
(5) 深层瞬态光谱_全球百科. https://vibaike.com/114166/.
(6) DLTS-深能级瞬态谱 - 豆丁网. https://www.docin.com/p-1230395169.html.

4.LGAD是低增益雪崩探测器(Low-Gain Avalanche Detector)的缩写,是一种新型半导体探测技术。其主要特点是通过在传统的N-in-P硅像素探测器的PN结下注入高浓度的P型掺杂,实现可控的内部增益。该类探测器具有响应快,抗辐照的特点,很快得到了粒子物理实验领域内的重视¹。

(1) 中国科大专注LGAD传感器研究 HGTD项目获CERN批准 - USTC. https://physics.ustc.edu.cn/2020/0923/c3588a451005/page.htm.
(2) Low gain avalanche detectors for particle physics and synchrotron .... https://theses.gla.ac.uk/81281/.
(3) Study of time resolution of low-gain avalanche detectors. https://www.sciencedirect.com/science/article/pii/S0168900220310615.
(4) Low-Gain Avalanche Detectors (LGAD) - CERN. https://rd50.web.cern.ch/doc/talks/2014-11-IEEE-2014-LGAD-poster-4%203-sm.pdf.
(5) Design of Low Gain Avalanche Detectors (LGAD) with 400 keV ion .... https://www.sciencedirect.com/science/article/pii/S0168900220309554.
(6) Performance of LGAD sensors with carbon enriched gain ... - ScienceDirect. https://www.sciencedirect.com/science/article/pii/S0168900222004375.

5.Shockley-Read-Hall(SRH) is a recombination process in semiconductors where conduction electrons can relax to the defect level and then relax to the valence band. This process is also called trap-assisted recombination where the electron in transition between bands passes through a new energy state (localized state) created within the band gap by a dopant or a defect in the crystal lattice; such energy states are called traps¹².

(1) 4. Recombination with Defect Levels (Shockley-Read-Hall). https://eng.libretexts.org/Bookshelves/Materials_Science/Supplemental_Modules_%28Materials_Science%29/Solar_Basics/C._Semiconductors_and_Solar_Interactions/IV._Recombination_of_Charge_Carriers/4._Recombination_with_Defect_Levels_%28Shockley-Read-Hall%29.
(2) Carrier generation and recombination - Wikipedia. https://en.wikipedia.org/wiki/Carrier_generation_and_recombination.
(3) Electron-Hole Recombination - Engineering LibreTexts. https://eng.libretexts.org/Bookshelves/Materials_Science/Supplemental_Modules_%28Materials_Science%29/Electronic_Properties/Electron-Hole_Recombination.
(4) 2.3.3 Recombination and Lifetime - Technische Fakultät. https://www.tf.uni-kiel.de/matwis/amat/semi_en/kap_2/backbone/r2_3_3.html.
(5) (PDF) On the Shockley-Read-Hall Model: Generation ... - ResearchGate. https://www.researchgate.net/publication/220222711_On_the_Shockley-Read-Hall_Model_Generation-Recombination_in_Semiconductors.
(6) Recombination and Generation - COMSOL Multiphysics. https://doc.comsol.com/5.5/doc/com.comsol.help.semicond/semicond_ug_semiconductor.6.54.html.

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