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HSMS SEMI E37标准英文版PDF
HSMS is intended as an alternative to SEMI E4
(SECS-I) for applications where higher speed communication
is needed or when a simple point-to-point
topology is insufficient. SEMI E4 (SECS-I) can still be
used in applications where these and other attributes of
HSMS are not required.
2018-11-21
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